Modeling and simulation methodology for impact microactuators

Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ideal for micropositioning systems due to their small size. Microactuators used to produce small displacements would need large actuation forces and a long driving distance. This would require large voltages to produce the desired forces. Actuators based on impulsive forces provide a solution to this problem. Many impact microactuators have been designed and fabricated in the past decade. Impacts are a source of nonlinearity and a careful study of the dynamics is essential in order to ensure consistent performance of the device. Currently, the state of the art lacks a robust design tool for such devices. The primary goal of this paper is to present a comprehensive modeling and simulation methodology for impact microactuators. The present study will aid in a more robust and consistent impact microactuator design.